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Scanning Electron Microscope

 

The LYRA3 XM. A fully PC controlled SEM with Schottky field emission cathode in combination with gallium Focused Ion Beam (FIB) column and optionally with Gas Injection System (GIS). Outstanding optical properties, flicker-free digital image with super clarity, sophisticated user-friendly software for SEM/FIB/GIS control and image capturing using Windows™ platform, standard formats of stored images, easy image management, processing and measurements, automatic set up of the system and many other automated operations are characteristic features of the equipment.

Analytical Potential

  1. XM chamber model provides superior specimen handling using a full 5-axis motorized compucentric stage and ideal geometry for EDX and EBSD
  2. Option of extra-large XM chamber with robust stage able to accommodate large samples
  3. Numerous interface ports with optimized analytical geometry for EDX, WDX and EBSD as well as for attaching many other detectors
  4. First-class YAG scintillator-based detectors
  5. Selection of optional detectors and accessories
  6. Full operating vacuum can be obtained quickly and easily
  7. Investigation of non-conductive samples in variable pressure mode versions, favorable conditions for the investigation of magnetic samples, non-distorted EBSD pattern compared to immersion magnetic lenses

Integrated active vibration isolation ensures effective reduction of ambient vibrations in the laboratory.

 

 

The LYRA3 GM. A fully PC controlled SEM with Schottky field emission cathode in combination with gallium Focused Ion Beam (FIB) column and optionally with Gas Injection System (GIS). Oustanding optical properties, flicker-free digital image with super clarity, sophisticated user-friendly software for SEM/FIB/GIS control and image capturing using Windows platform, standard formats of stored images, easy image management, processing and measurements, automatic set up of the system and many other automated operations are characteristic features of the equipment.

Analytical Potential

  1. High brightness Schottky emitter for high-resolution / high-current / low-noise imaging
  2. Extraordinary resolution with powerful optional In-Beam SE Detector
  3. Unique three-lens Wide Field Optics™ design offering the variety of working and displaying modes embodying the TESCAN proprietary Intermediate Lens (IML) for the beam aperture optimization
  4. Real time In-Flight Beam Tracing™ for the performance and beam optimization integrating the well-established software Electron Optical Design. It includes also direct and continual control of beam spot size and beam current
  5. Fast imaging rate
  6. Beam Deceleration Technology (BDT) for excellent resolution at low beam voltages (optional)
  7. In-Beam BSE Detector for BSE imaging at very short working distances (optional) suitable even for ferromagnetic samples imaging
  8. High-throughput large-area automation, e.g. automated particle location and analysis
  9. Superior specimen handling using a motorized compucentric stage
  10. Ideal geometry for EDX and EBSD; non-distorted EBSD pattern
  11. Fast and easy obtaining of the clean chamber vacuum by powerful turbomolecular and dry fore vacuum pump; electron gun pumping by ion getter pump
  12. Fully automated microscope setup including electron optics setup and alignment
  13. Network operations and built-in remote access/diagnostics, all come as the TESCAN standard
  14. Unique live stereoscopic imaging utilizing the 3D Beam Technology
  15. Extended low vacuum mode with chamber pressure up to 500 Pa for non-conducting specimens imaging
  16. Unique ion optic column differentially pumped (2 ion getter pumps) for ultra-low ion scattering effect
  17. Motorized aperture changer in ion column with ultra-high reproducibility
  18. Beam Blanker and Faraday cup included as standard accessories for ion column
  19. Ultra-high resolution and excellent performance at high current with optional Cobra column
  20. Automatic FIB cutting and signal acquiring followed by 3D reconstruction (tomography), allowing 3D EBSD, 3D EBIC etc. with integrated 3D visualization

Sophisticated software for SEM/FIB/GIS control, image acquisition, archiving, processing and analysis; multi-user environment localized in many languages

 

 

 

GAIA3

TESCAN GAIA3 brings together an ultra-high resolution electron column and high-performance ion column fitted onto a single chamber. Built on the proven (MAIA3) FE-SEM platform, GAIA3 extends all of its qualities with the ability to modify surfaces with a focused ion beam. The outstanding imaging capabilities of the GAIA3 begin with its novel FE-SEM with excellent resolution at low voltages. The objective lens is narrower than a conventional objective and InBeam SE and InBeam BSE detectors placed in the column gives free space over the sample for unlimited FIB work and various analytical techniques.

Key Benefits

  1. Extraordinary SEM resolution with single-pole 60⁰ objective lens
  2. Best-in-class range of display modes- FIELD, RESOLUTION and DEPTH – based on TESCAN’s unique WIDE Field Optics
  3. Superior specimen handling using a motorized compucentric stage
  4. Field-free mode for observing magnetic samples
  5. High probe current, up to 200nA (SEM)
  6. E-beam lithography with ultra-short dwell time down to 20ns
  7. Ultra-high FIB resolution and excellent performance at high current with a Cobra column and probe current 1pA to 50nA
  8. Powerful DrawBeam toolbox including a number of basic and advanced programmable objects with various process parameters
  9. Besides the ability to investigate and modify the sample surface with enormous analytical potential, an extraordinary number of ports that enables all the detectors and technique to focus on a common analytical workspace.

General Benefits

The imaging, analysis and control of matter at the nanometer scale are key factors in successfully conducting research today. Resolution, accuracy, reproducibility, robustness and flexibility are key characteristics for a leading-edge tool.

Following three generations of success in electron microscopy, GAIA3 is the next generation platform introduced by TESCAN. Combining unsurpassed nanometer resolution SEM performance with excellent COBRA-FIB capabilities, the new TESCAN GAIA3 offers wide range of analytical compatibilities.

The greatest benefit of the GAIA3 is its low-voltage SEM imaging while maintaining a high resolution. This is essential especially for examining sensitive or non-conductive samples with a small interaction volume therefore giving excellent resolution and unique low voltage contrast.

COBRA-FIB is top-level technology in terms of resolution for both imaging and milling. It is the sharpest FIB instrument for nano-engineering in its class.

 

 

 

The TESCAN Integrated Mineral Analyzer. TIMA, a fully automated, high throughput, analytical scanning electron microscope is designed specifically for the mining and minerals processing industry. The TIMA solution will address applications such as Mineral Liberation Analysis,TESCAN, a world leading manufacturer of scanning electron microscopes and focused ion beam workstations has introduced the TESCAN Integrated Mineral Analyzer.
TIMA, a fully automated, high throughput, analytical scanning electron microscope is designed specifically for the mining and minerals processing industry. The TIMA solution will address applications such as Mineral Liberation Analysis, process optimization, remediation, and search for precious metals and rare earths. TIMA measures modal abundance, size-by-size liberation, mineral association, and performs PGM search automatically on multiple samples of grain mounts and thin or polished sections.
TESCAN’s unique technology is based on a completely integrated EDX system that performs full spectrum imaging at very fast scan speeds. Image analysis in TIMA is performed simultaneously with SEM backscatter electron images and a suite of x-ray images. The level of hardware integration of the SEM and EDX allows for unprecedented acquisition speeds for fully automated data collection, resulting in fast, accurate, repeatable and reliable results. process optimization, remediation, and search for precious metals and rare earths

TIMA Advantages:

  • Very fast and fully automated data acquisition process reached via SEM and EDX high level hardware integration
  • System based on MIRA or VEGA SEM platform proven by customers in many countries
  • Special VEGA column design significantly extending tungsten filament lifetime
  • Newly designed exchangeable sample holder with integrated fixed BSE/EDX calibration standard and Faraday cup
  • Possibility to modify size of samples according to customer demands
  • Up to 4 integrated EDX detectors for maximum system performance
  • New Peltier cooled EDX detector type for thermal stability guarantee
  • Improved approach to data analysis increasing speed and reliability of process
  • Variable dwell time and EDX analysis duration adapting to each part of the sample
  • Software released in three editions
  • Various modules for data analysis
  • Customizable classification rules
  • Favorable price to performance ratio
  • Custom solution possibilities