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Scanning Electron Microscope

 

The FERA3 XM. A fully PC controlled SEM with Schottky field emission cathode in combination with Xe Plasma Focused Ion Beam (i-FIB) column and optionally with Gas Injection System (GIS). Outstanding optical properties, flicker-free digital image with super clarity, sophisticated user-friendly software for SEM/FIB/GIS control and image capturing using Windows™ platform, standard formats of stored images, easy image management, processing and measurements, automatic set up of the system and many other automated operations are characteristic features of the equipment.

Analytical Potential

  • High brightness Schottky emitter for high-resolution / high-current / low-noise imaging
  • Extraordinary resolution with powerful optional In-Beam SE Detector 
  • Unique three-lens Wide Field Optics™ design offering the variety of working and displaying modes embodying the TESCAN proprietary Intermediate Lens (IML) for the beam aperture optimization 
  • Real time In-Flight Beam Tracing™ for the performance and beam optimization integrating the well-established software Electron Optical Design. It includes also direct and continual control of beam spot size and beam current
  • Fast imaging rate 
  • Beam Deceleration Technology (BDT) for excellent resolution at low beam voltages (optional)
  • In-Beam BSE Detector for BSE imaging at very short working distances (optional) suitable even for ferromagnetic samples imaging
  • High-throughput large-area automation, e.g. automated particle location and analysis 
  • Superior specimen handling using a motorized compucentric stage
  • Ideal geometry for EDX and EBSD; non-distorted EBSD pattern
  • Fast and easy obtaining of the clean chamber vacuum by powerful turbomolecular and dry fore vacuum pump; electron gun pumping by ion getter pump
  • Fully automated microscope setup including electron optics setup and alignment
  • Network operations and built-in remote access/diagnostics, all come as the TESCAN standard
  • Unique live stereoscopic imaging utilizing the 3D Beam Technology
  • Extended low vacuum mode with chamber pressure up to 500 Pa for non-conducting specimens imaging
  • Unique ion optic column differentially pumped (2 ion getter pumps) for ultra-low ion scattering effect
  • Motorized aperture changer in ion column with ultra-high reproducibility
  • Beam Blanker and Faraday cup included as standard accessories for ion column
  • Ultra-high milling rate and excellent performance at high currents 
  • Automatic FIB cutting and signal acquiring followed by 3D reconstruction (tomography), allowing 3D EBSD, 3D EBIC etc. with integrated 3D visualization
  • Sophisticated software for SEM/FIB/GIS control, image acquisition, archiving, processing and analysis; multi-user environment localized in many languages

 

 

The FERA3 GM. A fully PC controlled SEM with Schottky field emission cathode in combination with gallium Focused Ion Beam (FIB) column and optionally with Gas Injection System (GIS). Oustanding optical properties, flicker-free digital image with super clarity, sophisticated user-friendly software for SEM/FIB/GIS control and image capturing using Windows platform, standard formats of stored images, easy image management, processing and measurements, automatic set up of the system and many other automated operations are characteristic features of the equipment.

Analytical Potential

  • High brightness Schottky emitter for high-resolution / high-current / low-noise imaging
  • Extraordinary resolution with powerful optional In-Beam SE Detector
  • Unique three-lens Wide Field Optics™ design offering the variety of working and displaying modes embodying the TESCAN proprietary Intermediate Lens (IML) for the beam aperture optimization
  • Real time In-Flight Beam Tracing™ for the performance and beam optimization integrating the well-established software Electron Optical Design. It includes also direct and continual control of beam spot size and beam current
  • Fast imaging rate
  • Beam Deceleration Technology (BDT) for excellent resolution at low beam voltages (optional)
  • In-Beam BSE Detector for BSE imaging at very short working distances (optional) suitable even for ferromagnetic samples imaging
  • High-throughput large-area automation, e.g. automated particle location and analysis
  • Superior specimen handling using a motorized compucentric stage
  • Ideal geometry for EDX and EBSD; non-distorted EBSD pattern
  • Fast and easy obtaining of the clean chamber vacuum by powerful turbomolecular and dry fore vacuum pump; electron gun pumping by ion getter pump
  • Fully automated microscope setup including electron optics setup and alignment
  • Network operations and built-in remote access/diagnostics, all come as the TESCAN standard
  • Unique live stereoscopic imaging utilizing the 3D Beam Technology
  • Extended low vacuum mode with chamber pressure up to 500 Pa for non-conducting specimens imaging
  • Unique ion optic column differentially pumped (2 ion getter pumps) for ultra-low ion scattering effect
  • Motorized aperture changer in ion column with ultra-high reproducibility
  • Beam Blanker and Faraday cup included as standard accessories for ion column
  • Ultra-high resolution and excellent performance at high current with optional Cobra column
  • Automatic FIB cutting and signal acquiring followed by 3D reconstruction (tomography), allowing 3D EBSD, 3D EBIC etc. with integrated 3D visualization
  • Sophisticated software for SEM/FIB/GIS control, image acquisition, archiving, processing and analysis; multi-user environment localized in many languages

 

 

XEIA3

New UHR SEM/FIB workstation

Whether your applications demand extremely powerful and ultra-fast micro-/nano-FIB machining, an outstanding image resolution at low beam energies, ultra- fast and reliable microanalysis or 3D analytical reconstructions, XEIA3 stands out as the ideal turnkey solution that offers all these capabilities in one single and unique instrument with ultimate performance.

KEY FEATURES

  1. Powerful SEM column equipped with a high brightness Schottky emitter for high currents, low-noise and extraordinary imaging
  2. In-Beam detectors for high signaling and excellent imaging at very shot working distances
  3. Ultra-fast xenon plasma ion source FIB. High Beam currents for outstanding milling speeds and an excellent performance in removing large volumes of material, and low beam currents for smooth polishing
  4. Less implantation, doping or degradation of insulator deposition a valuable feature for semiconductor industry
  5. Simultaneous SEM imaging during FIB milling or deposition (Two independent scan generators)
  6. Unique and advanced TESCAN’s technologies in terms of automated operations such as the In-flight Beam Tracing™ designed to accurately compute and adjust all the optimal parameters (WD, magnification, etc) for high resolution imaging
  7. Advanced patterning and 3D characterisations capabilities powered by DrawBeam, a pattern editing tool that also provided a real-time visualization during milling or lithographic processes
  8. Novel solution for fast 3-dimensional microanalysis such as 3D EDX and EBSD reconstructions
  9. Unique integration with TOF-SIMS and scanning probe microscope 12” wafer inspection by means of an extended chamber size for enabling 6”, 8” and 12” wafer inspection. 12” wafer inspection is an exclusive feature of TESCAN equipment
  10. Gas Injection System (GIS) for enhancing your FIB applications
  11. High-performance electronics for faster image acquisition up to 20ns/pxl, excellent deposition rate and an ultra-fast scannings
  12. Powerful turbomolecular and dry fore vacuum pump for keeping the chamber clean. Electron gun pumping by ion getter pump

 

 

Q-Phase

Tescan proudly introduces the Q-PHASE, a multimodal holographic microscope (MHM). With this instrument TESCAN expands in o the field of advanced light microscopy. The Q-Phase is a unique instrument for quantitative phase imaging (QPI) bases on the patented technology of Coherence-controlled holographic microscopy. This technology used incoherent light sources (Halogen lamp, LED) providing the highest quality, without any compromises and it is the only QPI technique enabling imaging of samples in scattering media. The Q-PHASE is purposely designed to observe living cells in vitro. It is based on a robust inverted transmission microscope platform. The whole system is situated in a microscope incubator. The full motorization fulfills even the highest demands regarding experiment automation. Futhermore, this system includes multiple imaging modes with fully integrated Fluorescence Module, simulated DIC and Brightfield imaging options. All these features make the Q-PHASE a valuable research tool for biological and biotechnical applications such as testing reactions of cells to a specific treatment-even with scattering non-transparent substances, monitoring cell’s life cycle including mitosis, distinguishing between different forms of cell deaths, analyzing cell growth, motility or morphology changes, imaging cells in extracellular matrices.

Key Features and advantages

  • No image artifacts such as halo effect (as opposed to techniques based on Zernike phase contrast illumination)
  • Enables very precise detection of cell boundaries
  • Strong suppression of coherent noise(Speckles) & parasitic interferences (as opposed to laser-based approaches)
  • Label-free- no staining is needed, simple sample preparation, observation of live cells in their native environment, no photobleaching problems
  • Low phototoxicity- low light power density (10⁷x lower than fluorescence microscopy) allows long-term observations (for days)
  • Coherence-gating effect- Q-PHASE special feature enabling to observe samples even in scattering media (phospholipid emulsions, extracellular matrices, etc)
  • Multimodality- fully integrated fluorescence module, simulated DIC and brightfield which enables automatic multimodal imaging of the sample
  • High- quality QPI- unique Q-PHASE’s optical setup allows using incoherent illumination which provides extraordinary imaging quality without any compromises
  • Lateral resolution of conventional microscope (up to 2x better when compared to common laser-based approaches or pinhole spatial filtering based techniques)
  • Fast acquisition- use of off-axis holographic approach makes Q-PHASE a single shot instrument, thus enabling imaging of very fast cell dynamics.
  • Full motorization- focusing, sample stage, objective exchange, fluorescence filters
  • Automated multidimensional acquisition- time-lapse, channel, position, Z-stack
  • Simple image segmentation and processing – comparable to fluorescence date processing
  • Quantitative- phase values can be recalculated e.g to cell dry-mass density (pg/um²) or direct topography with nanometer sensitivity (Usually non-biological samples with homogeneous refractive index distribution)
  • High phase detection sensitivity- enables to detect even the smallest changes in axial direction, very sensitive detection of morphology or position changes